EFM

Product Description:

NanoWorld Pointprobe® EFM probes are designed for electrostatic force microscopy. The force constant and the special coating of the EFM type are optimised for this type of application. This type of probe yields a very high force sensitivity, while simultaneously enabling tapping^™ and lift mode operation.

All SPM and AFM probes of the Pointprobe® series are made from monolithic silicon which is highly doped to dissipate static charge. They are chemically inert and offer a high mechanical Q-factor for high sensitivity. The tip is shaped like a polygon based pyramid.

Additionally, this AFM tip offers an excellent tip radius of curvature.

Application Modes:

• Conductive AFM Probes
• OLYMPUS*** Replacement AFM Probes

AFM Probe Specifications:

AFM Tips:

shape	tip height	tip set back	tip radius	full cone angle	half cone angle
Standard	0 µm (10 - 15 µm)*	10 - 15 µm*	0 µm ( 0 - 0 µm)*	< 25 nm

AFM Cantilever(s):

cant.	shape	length	width	thickness	force const.	res. freq.	probe base
	Beam	225 µm (220 - 230 µm)*	28 µm (22.5 - 32.5 µm)*	3 µm (2.5 - 3.5 µm)*	2.8 N/m (1.2 - 5.5 N/m)*	75 kHz (60 - 90 kHz)*

* typical range

Coating:

PtIr5 Coating

The PtIr5 coating consists of a 23 nm thick platinum iridium5 layer deposited on both sides of the cantilever. The tip side coating enhances the conductivity of the tip and allows electrical contacts. The detector side coating enhances the reflectance of the laser beam by a factor of 2 and prevents light from interfering within the cantilever.

The coating process is optimized for stress compensation and wear resistance. Wear at the tip can occur if operating in contact-, friction- or force modulation mode. As the coating is almost stress-free the bending of the cantilever due to stress is less than 2 degrees.

Probes Datasheets:

Datasheet for all probes with sets of 10 or 20 probes.
Datasheet for up to 32 probes with full wafer.