Your order will be processed in GBP.
[switch currency to EUR]

Order Request an official quote (RFQ)
Order Code, Price (EUR/GBP) Items per set
Mounted on 12mm round metal plate
1 pcs
€ 200.00 £ 186.00 add to shopping cart
Unmounted (chip only, no plate)
1 pcs
€ 200.00 £ 186.00 add to shopping cart

Product Availability: 5 - 10 working days

AFM Probe type:


Manufacturer: MikroMasch
SEM image of a TGX01 grating
Product Description:

The silicon calibration grating from the TGX series is an array of square holes with sharp undercut edges formed by anisotropic etching along the (111) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.

  • pitch 3 µm, accuracy 0.1 µm
  • edge radii < 5 nm
  • step height ~ 1 µm (approximate value, not for vertical calibration purposes)
  • active area 1 x 1 mm
  • chip dimensions 5 x 5 x 0.3 mm
  • available mounted on 12 mm plate (TGX) or unmounted (TGX/NM)


The TGX calibration gratings are intended for: 

  • determination of the tip aspect ratio
  • lateral calibration of SPM scanners
  • detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects

For accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology.

Apex Probes Ltd., 12th Floor, Ocean House, The Ring, Bracknell, RG12 1AX, Phone: +44 (0)1344 388016
© 2018 - Apex Probes | design by ISB