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Order Code, Price (EUR/GBP) Items per set
2D200 1 pcs
€ 1200.00 £ 1116.00 add to shopping cart

Product Availability: 5 - 10 working days

AFM Probe type:

Lateral-(xy)-Calibration Standard (2D200)

Manufacturer: NANOSENSORS
Product Description:

The standard (2D200) is used for a very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 200nm pitch etched into a silicon chip.

The active area is located in the center of the chip and is surrounded by the FindMe structure. The lattice of inverted pyramids make up the active area.

The silicon chip is glued onto a stainless steel sample holder with 12 mm diameter. This holder can be magnetically or mechanically fixed. The product will be shipped in a Gel-Pak® carrier

This standard has been developed in close cooperation with the German national authority of standards: PTB (Physikalisch Technische Bundesanstalt). Due to this PTB is able to certify this standard in accordance with international guidelines. Please contact Working Group 5.25 Scanning Probe Metrology at directly.

Gel-Pak® is a registered trademark of Delphon Industries

200 nm pitch
high accuracy
Chip size 5x7
Active area 100x100
Pitch 200 nm
Accuracy of pyramid position 10 nm
Accuracy of pitch (10x10 µm2 scan) ±0.1%
Accuracy of pitch (100x100 µm2 scan) ±0.01%
Edge length of square pyramids aprox. 100 nm
Sidewall angle (versus wafer surface) 54.7°
Accuracy of sidewall angle 0.5
Depth of pyramids approx. 70 nm
Apex Probes Ltd., 12th Floor, Ocean House, The Ring, Bracknell, RG12 1AX, Phone: +44 (0)1344 388016
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