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Order Code, Price (EUR/GBP) Items per set
IVPS100 1 pcs
€ 2817.00 £ 2620.00 add to shopping cart

Product Availability: 5 - 10 working days


AFM Probe type:

IVPS100

Manufacturer: Team Nanotec
Product Description:

Improved Vertical Parallel Structure

Probe tip characterizers are used to check the shape and the dimension of the probe tip.

Each cell is numbered, which facilitates recalibration at the identical position.
 
 
Layout:
81 cells on 1 x 1 mm area, on 6 x 6 mm silicon chip


Specifications:


-Material: Silicon
-Width of line: 100 nm - actual linewidth is delivered for each chip
- Pitch: 500 nm ± 10nm
- Depth of line: ~ 1 µm
- Surface/sidewall angle: < 90° ± 0,5°
- Sidewall parallelity: < 1°
- Top corner radius: < 10 nm

Special layout makes it easy, to return with a tip always to the identical characterizer position. Many identical sites on a single characterizer chip help to increase lifetime.
Apex Probes Ltd., 12th Floor, Ocean House, The Ring, Bracknell, RG12 1AX, Phone: +44 (0)1344 388016
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